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Spin-on Dual Hard Mask Material | JSR Micro NV
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Microwaves101 | Photolithography 101
The investigation of DARC etch back in DRAM capacitor oxide mask opening
Integrated process feasibility of hard-mask for tight pitch interconnects fabrication (MEMS and Nanotechnology)
Party Hard Mask - 3D model by HulioO (@HulioO) [048a5aa]
생생한 반도체 이야기 – 미세패터닝 기술의 한계를 넘는 더블 패터닝 기술(2) — Steemit
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Semiconductor Process Materials|Semiconductor material: etc
Precision micro-mechanical components in single crystal diamond by deep reactive ion etching | Microsystems & Nanoengineering
Use of oxide hard mask for patterning low-κ dielectric. | Download Scientific Diagram
Etch Overview
Amorphous Carbon Hard Mask for Multiple Patterning Lithography | Semantic Scholar
Micromachines | Free Full-Text | A Magnetic Metal Hard Mask on Silicon Substrate for Direct Patterning Ultra-High-Resolution OLED Displays